10/7/2010	10:16:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2010	10:16:34 AM	Recipe started at 10:16 AM
10/7/2010	10:16:34 AM	H2 valve closed
10/7/2010	10:16:34 AM	BCl3 valve closed
10/7/2010	10:16:34 AM	PH3 valve closed
10/7/2010	10:16:34 AM	SiCl4 pre valve closed
10/7/2010	10:16:34 AM	SiCl4 post valve closed
10/7/2010	10:16:34 AM	Main Vac valve closed
10/7/2010	10:16:34 AM	Bypass valve closed
10/7/2010	10:16:34 AM	Bubbler valve closed
10/7/2010	10:16:34 AM	Helium valve opened
10/7/2010	10:16:34 AM	Helium MFC set to  500.000000
10/7/2010	10:16:34 AM	H2 MFC set to  0.000000
10/7/2010	10:16:34 AM	BCl3 MFC set to  0.000000
10/7/2010	10:16:34 AM	PHl3 MFC set to  0.000000
10/7/2010	10:16:34 AM	SiCl4 MFC set to  0.000000
10/7/2010	10:16:34 AM	Bypass solenoid MFC set to  0.000000
10/7/2010	10:16:34 AM	Tube furnace set to 0
10/7/2010	10:17:54 AM	Helium valve closed
10/7/2010	10:17:54 AM	H2 valve closed
10/7/2010	10:17:54 AM	BCl3 valve closed
10/7/2010	10:17:54 AM	PH3 valve closed
10/7/2010	10:17:54 AM	SiCl4 pre valve closed
10/7/2010	10:17:54 AM	SiCl4 post valve closed
10/7/2010	10:17:54 AM	Main Vac valve closed
10/7/2010	10:17:54 AM	Bypass valve closed
10/7/2010	10:17:54 AM	Bubbler valve closed
10/7/2010	10:17:54 AM	Helium MFC set to  0.000000
10/7/2010	10:17:54 AM	H2 MFC set to  0.000000
10/7/2010	10:17:54 AM	BCl3 MFC set to  0.000000
10/7/2010	10:17:54 AM	PHl3 MFC set to  0.000000
10/7/2010	10:17:54 AM	SiCl4 MFC set to  0.000000
10/7/2010	10:17:54 AM	Bypass solenoid MFC set to  0.000000
10/7/2010	10:17:55 AM	Tube furnace set to 0
10/7/2010	10:17:55 AM	Run finished at 10:17 AM
10/7/2010	10:17:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2010	10:21:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2010	10:21:46 AM	Recipe started at 10:21 AM
10/7/2010	10:21:46 AM	Helium valve closed
10/7/2010	10:21:46 AM	H2 valve closed
10/7/2010	10:21:46 AM	BCl3 valve closed
10/7/2010	10:21:46 AM	PH3 valve closed
10/7/2010	10:21:46 AM	SiCl4 pre valve closed
10/7/2010	10:21:46 AM	SiCl4 post valve closed
10/7/2010	10:21:46 AM	Main Vac valve closed
10/7/2010	10:21:46 AM	Bubbler valve closed
10/7/2010	10:21:46 AM	Bypass valve opened
10/7/2010	10:21:46 AM	Helium MFC set to  0.000000
10/7/2010	10:21:46 AM	H2 MFC set to  0.000000
10/7/2010	10:21:46 AM	BCl3 MFC set to  0.000000
10/7/2010	10:21:46 AM	PHl3 MFC set to  0.000000
10/7/2010	10:21:46 AM	SiCl4 MFC set to  0.000000
10/7/2010	10:21:46 AM	Bypass solenoid MFC set to  0.000000
10/7/2010	10:21:46 AM	Tube furnace set to 0
10/7/2010	10:22:43 AM	Helium valve closed
10/7/2010	10:22:43 AM	H2 valve closed
10/7/2010	10:22:43 AM	BCl3 valve closed
10/7/2010	10:22:43 AM	PH3 valve closed
10/7/2010	10:22:43 AM	SiCl4 pre valve closed
10/7/2010	10:22:43 AM	SiCl4 post valve closed
10/7/2010	10:22:43 AM	Bubbler valve closed
10/7/2010	10:22:43 AM	Main Vac valve opened
10/7/2010	10:22:43 AM	Bypass valve opened
10/7/2010	10:22:43 AM	Helium MFC set to  0.000000
10/7/2010	10:22:43 AM	H2 MFC set to  0.000000
10/7/2010	10:22:43 AM	BCl3 MFC set to  0.000000
10/7/2010	10:22:43 AM	PHl3 MFC set to  0.000000
10/7/2010	10:22:43 AM	SiCl4 MFC set to  0.000000
10/7/2010	10:22:43 AM	Bypass solenoid MFC set to  0.000000
10/7/2010	10:22:43 AM	Tube furnace set to 0
10/7/2010	10:22:43 AM	Run finished at 10:22 AM
10/7/2010	10:22:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2010	2:44:56 PM	Helium valve opened
10/7/2010	2:44:58 PM	Helium MFC set to  100.000000
10/7/2010	2:45:28 PM	Tube furnace set to 100
10/7/2010	2:49:31 PM	Helium valve closed
10/7/2010	2:49:33 PM	Helium MFC set to  0.000000
10/7/2010	2:58:51 PM	Bypass valve closed
10/7/2010	2:58:52 PM	Bypass valve opened
10/7/2010	2:58:52 PM	Main Vac valve closed
10/7/2010	2:58:53 PM	Main Vac valve opened
10/7/2010	2:58:55 PM	Helium valve opened
10/7/2010	2:58:58 PM	Helium MFC set to  100.000000
10/7/2010	3:04:14 PM	Helium valve closed
10/7/2010	3:04:16 PM	Helium MFC set to  0.000000
10/7/2010	3:06:36 PM	Recipe started at 3:06 PM
10/7/2010	3:06:36 PM	Helium valve closed
10/7/2010	3:06:36 PM	BCl3 valve closed
10/7/2010	3:06:36 PM	PH3 valve closed
10/7/2010	3:06:36 PM	SiCl4 pre valve closed
10/7/2010	3:06:36 PM	SiCl4 post valve closed
10/7/2010	3:06:36 PM	Main Vac valve closed
10/7/2010	3:06:36 PM	Bypass valve closed
10/7/2010	3:06:36 PM	Bubbler valve closed
10/7/2010	3:06:36 PM	H2 valve opened
10/7/2010	3:06:36 PM	Helium MFC set to  0.000000
10/7/2010	3:06:36 PM	H2 MFC set to  500.000000
10/7/2010	3:06:36 PM	BCl3 MFC set to  0.000000
10/7/2010	3:06:36 PM	PHl3 MFC set to  0.000000
10/7/2010	3:06:36 PM	SiCl4 MFC set to  0.000000
10/7/2010	3:06:36 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	3:06:36 PM	Tube furnace set to 100
10/7/2010	3:07:56 PM	Helium valve closed
10/7/2010	3:07:56 PM	BCl3 valve closed
10/7/2010	3:07:56 PM	PH3 valve closed
10/7/2010	3:07:56 PM	SiCl4 pre valve closed
10/7/2010	3:07:56 PM	SiCl4 post valve closed
10/7/2010	3:07:56 PM	Main Vac valve closed
10/7/2010	3:07:56 PM	Bypass valve closed
10/7/2010	3:07:56 PM	H2 valve opened
10/7/2010	3:07:56 PM	Bubbler valve opened
10/7/2010	3:07:56 PM	Helium MFC set to  0.000000
10/7/2010	3:07:56 PM	H2 MFC set to  500.000000
10/7/2010	3:07:56 PM	BCl3 MFC set to  0.000000
10/7/2010	3:07:56 PM	PHl3 MFC set to  0.000000
10/7/2010	3:07:56 PM	SiCl4 MFC set to  0.000000
10/7/2010	3:07:56 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	3:07:56 PM	Tube furnace set to 1000
10/7/2010	3:27:56 PM	Helium valve closed
10/7/2010	3:27:56 PM	PH3 valve closed
10/7/2010	3:27:56 PM	Main Vac valve closed
10/7/2010	3:27:56 PM	Bypass valve closed
10/7/2010	3:27:56 PM	H2 valve opened
10/7/2010	3:27:56 PM	BCl3 valve opened
10/7/2010	3:27:56 PM	SiCl4 pre valve opened
10/7/2010	3:27:56 PM	SiCl4 post valve opened
10/7/2010	3:27:56 PM	Bubbler valve opened
10/7/2010	3:27:56 PM	Helium MFC set to  0.000000
10/7/2010	3:27:56 PM	H2 MFC set to  500.000000
10/7/2010	3:27:56 PM	BCl3 MFC set to  10.000000
10/7/2010	3:27:56 PM	PHl3 MFC set to  0.000000
10/7/2010	3:27:56 PM	SiCl4 MFC set to  50.000000
10/7/2010	3:27:56 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	3:27:56 PM	Tube furnace set to 1000
10/7/2010	3:39:56 PM	H2 valve closed
10/7/2010	3:39:56 PM	BCl3 valve closed
10/7/2010	3:39:56 PM	PH3 valve closed
10/7/2010	3:39:56 PM	SiCl4 pre valve closed
10/7/2010	3:39:56 PM	SiCl4 post valve closed
10/7/2010	3:39:56 PM	Main Vac valve closed
10/7/2010	3:39:56 PM	Bypass valve closed
10/7/2010	3:39:56 PM	Helium valve opened
10/7/2010	3:39:56 PM	Bubbler valve opened
10/7/2010	3:39:56 PM	Helium MFC set to  500.000000
10/7/2010	3:39:56 PM	H2 MFC set to  0.000000
10/7/2010	3:39:56 PM	BCl3 MFC set to  0.000000
10/7/2010	3:39:56 PM	PHl3 MFC set to  0.000000
10/7/2010	3:39:56 PM	SiCl4 MFC set to  0.000000
10/7/2010	3:39:56 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	3:39:57 PM	Tube furnace set to 0
10/7/2010	3:59:56 PM	Helium valve closed
10/7/2010	3:59:56 PM	H2 valve closed
10/7/2010	3:59:56 PM	BCl3 valve closed
10/7/2010	3:59:56 PM	PH3 valve closed
10/7/2010	3:59:56 PM	SiCl4 pre valve closed
10/7/2010	3:59:57 PM	SiCl4 post valve closed
10/7/2010	3:59:57 PM	Main Vac valve closed
10/7/2010	3:59:57 PM	Bypass valve closed
10/7/2010	3:59:57 PM	Bubbler valve closed
10/7/2010	3:59:57 PM	Helium MFC set to  0.000000
10/7/2010	3:59:57 PM	H2 MFC set to  0.000000
10/7/2010	3:59:57 PM	BCl3 MFC set to  0.000000
10/7/2010	3:59:57 PM	PHl3 MFC set to  0.000000
10/7/2010	3:59:57 PM	SiCl4 MFC set to  0.000000
10/7/2010	3:59:57 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	3:59:57 PM	Tube furnace set to 0
10/7/2010	3:59:57 PM	Run finished at 3:59 PM
10/7/2010	4:40:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2010	4:40:39 PM	Recipe started at 4:40 PM
10/7/2010	4:40:39 PM	Helium valve closed
10/7/2010	4:40:39 PM	H2 valve closed
10/7/2010	4:40:39 PM	BCl3 valve closed
10/7/2010	4:40:39 PM	PH3 valve closed
10/7/2010	4:40:39 PM	SiCl4 pre valve closed
10/7/2010	4:40:39 PM	SiCl4 post valve closed
10/7/2010	4:40:39 PM	Main Vac valve closed
10/7/2010	4:40:39 PM	Bubbler valve closed
10/7/2010	4:40:39 PM	Bypass valve opened
10/7/2010	4:40:39 PM	Helium MFC set to  0.000000
10/7/2010	4:40:39 PM	H2 MFC set to  0.000000
10/7/2010	4:40:39 PM	BCl3 MFC set to  0.000000
10/7/2010	4:40:39 PM	PHl3 MFC set to  0.000000
10/7/2010	4:40:39 PM	SiCl4 MFC set to  0.000000
10/7/2010	4:40:39 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	4:40:39 PM	Tube furnace set to 0
10/7/2010	4:44:17 PM	Run aborted at 4:44 PM
10/7/2010	4:44:17 PM	Helium valve closed
10/7/2010	4:44:17 PM	H2 valve closed
10/7/2010	4:44:17 PM	BCl3 valve closed
10/7/2010	4:44:17 PM	PH3 valve closed
10/7/2010	4:44:17 PM	SiCl4 pre valve closed
10/7/2010	4:44:17 PM	SiCl4 post valve closed
10/7/2010	4:44:17 PM	Bypass valve closed
10/7/2010	4:44:17 PM	Main Vac valve closed
10/7/2010	4:44:17 PM	Bubbler valve closed
10/7/2010	4:44:17 PM	Helium MFC set to  0.000000
10/7/2010	4:44:17 PM	H2 MFC set to  0.000000
10/7/2010	4:44:17 PM	BCl3 MFC set to  0.000000
10/7/2010	4:44:17 PM	PHl3 MFC set to  0.000000
10/7/2010	4:44:17 PM	SiCl4 MFC set to  0.000000
10/7/2010	4:44:17 PM	Tube furnace set to 0
10/7/2010	4:44:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2010	4:46:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2010	4:46:08 PM	Recipe started at 4:46 PM
10/7/2010	4:46:08 PM	Helium valve closed
10/7/2010	4:46:08 PM	H2 valve closed
10/7/2010	4:46:08 PM	BCl3 valve closed
10/7/2010	4:46:08 PM	PH3 valve closed
10/7/2010	4:46:08 PM	SiCl4 pre valve closed
10/7/2010	4:46:08 PM	SiCl4 post valve closed
10/7/2010	4:46:08 PM	Main Vac valve closed
10/7/2010	4:46:08 PM	Bubbler valve closed
10/7/2010	4:46:08 PM	Bypass valve opened
10/7/2010	4:46:08 PM	Helium MFC set to  0.000000
10/7/2010	4:46:08 PM	H2 MFC set to  0.000000
10/7/2010	4:46:08 PM	BCl3 MFC set to  0.000000
10/7/2010	4:46:08 PM	PHl3 MFC set to  0.000000
10/7/2010	4:46:08 PM	SiCl4 MFC set to  0.000000
10/7/2010	4:46:08 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	4:46:09 PM	Tube furnace set to 0
10/7/2010	4:46:26 PM	Run aborted at 4:46 PM
10/7/2010	4:46:26 PM	Helium valve closed
10/7/2010	4:46:26 PM	H2 valve closed
10/7/2010	4:46:26 PM	BCl3 valve closed
10/7/2010	4:46:26 PM	PH3 valve closed
10/7/2010	4:46:26 PM	SiCl4 pre valve closed
10/7/2010	4:46:26 PM	SiCl4 post valve closed
10/7/2010	4:46:26 PM	Bypass valve closed
10/7/2010	4:46:26 PM	Main Vac valve closed
10/7/2010	4:46:26 PM	Bubbler valve closed
10/7/2010	4:46:26 PM	Helium MFC set to  0.000000
10/7/2010	4:46:26 PM	H2 MFC set to  0.000000
10/7/2010	4:46:26 PM	BCl3 MFC set to  0.000000
10/7/2010	4:46:26 PM	PHl3 MFC set to  0.000000
10/7/2010	4:46:26 PM	SiCl4 MFC set to  0.000000
10/7/2010	4:46:27 PM	Tube furnace set to 0
10/7/2010	4:46:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2010	4:51:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2010	4:51:48 PM	Recipe started at 4:51 PM
10/7/2010	4:51:48 PM	Helium valve closed
10/7/2010	4:51:48 PM	H2 valve closed
10/7/2010	4:51:48 PM	BCl3 valve closed
10/7/2010	4:51:48 PM	PH3 valve closed
10/7/2010	4:51:48 PM	SiCl4 pre valve closed
10/7/2010	4:51:48 PM	SiCl4 post valve closed
10/7/2010	4:51:48 PM	Main Vac valve closed
10/7/2010	4:51:48 PM	Bubbler valve closed
10/7/2010	4:51:48 PM	Bypass valve opened
10/7/2010	4:51:48 PM	Helium MFC set to  0.000000
10/7/2010	4:51:48 PM	H2 MFC set to  0.000000
10/7/2010	4:51:48 PM	BCl3 MFC set to  0.000000
10/7/2010	4:51:48 PM	PHl3 MFC set to  0.000000
10/7/2010	4:51:48 PM	SiCl4 MFC set to  0.000000
10/7/2010	4:51:48 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	4:51:48 PM	Tube furnace set to 0
10/7/2010	4:51:59 PM	Run aborted at 4:51 PM
10/7/2010	4:51:59 PM	Helium valve closed
10/7/2010	4:51:59 PM	H2 valve closed
10/7/2010	4:51:59 PM	BCl3 valve closed
10/7/2010	4:51:59 PM	PH3 valve closed
10/7/2010	4:51:59 PM	SiCl4 pre valve closed
10/7/2010	4:51:59 PM	SiCl4 post valve closed
10/7/2010	4:51:59 PM	Bypass valve closed
10/7/2010	4:51:59 PM	Main Vac valve closed
10/7/2010	4:51:59 PM	Bubbler valve closed
10/7/2010	4:51:59 PM	Helium MFC set to  0.000000
10/7/2010	4:51:59 PM	H2 MFC set to  0.000000
10/7/2010	4:51:59 PM	BCl3 MFC set to  0.000000
10/7/2010	4:51:59 PM	PHl3 MFC set to  0.000000
10/7/2010	4:51:59 PM	SiCl4 MFC set to  0.000000
10/7/2010	4:51:59 PM	Tube furnace set to 0
10/7/2010	4:51:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2010	4:53:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2010	4:53:40 PM	Recipe started at 4:53 PM
10/7/2010	4:53:40 PM	Helium valve closed
10/7/2010	4:53:40 PM	H2 valve closed
10/7/2010	4:53:40 PM	BCl3 valve closed
10/7/2010	4:53:40 PM	PH3 valve closed
10/7/2010	4:53:40 PM	SiCl4 pre valve closed
10/7/2010	4:53:40 PM	SiCl4 post valve closed
10/7/2010	4:53:40 PM	Main Vac valve closed
10/7/2010	4:53:40 PM	Bubbler valve closed
10/7/2010	4:53:40 PM	Bypass valve opened
10/7/2010	4:53:40 PM	Helium MFC set to  0.000000
10/7/2010	4:53:40 PM	H2 MFC set to  0.000000
10/7/2010	4:53:40 PM	BCl3 MFC set to  0.000000
10/7/2010	4:53:40 PM	PHl3 MFC set to  0.000000
10/7/2010	4:53:40 PM	SiCl4 MFC set to  0.000000
10/7/2010	4:53:40 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	4:53:40 PM	Tube furnace set to 0
10/7/2010	4:53:47 PM	Run aborted at 4:53 PM
10/7/2010	4:53:47 PM	Helium valve closed
10/7/2010	4:53:47 PM	H2 valve closed
10/7/2010	4:53:47 PM	BCl3 valve closed
10/7/2010	4:53:47 PM	PH3 valve closed
10/7/2010	4:53:47 PM	SiCl4 pre valve closed
10/7/2010	4:53:47 PM	SiCl4 post valve closed
10/7/2010	4:53:47 PM	Bypass valve closed
10/7/2010	4:53:47 PM	Main Vac valve closed
10/7/2010	4:53:47 PM	Bubbler valve closed
10/7/2010	4:53:47 PM	Helium MFC set to  0.000000
10/7/2010	4:53:47 PM	H2 MFC set to  0.000000
10/7/2010	4:53:47 PM	BCl3 MFC set to  0.000000
10/7/2010	4:53:47 PM	PHl3 MFC set to  0.000000
10/7/2010	4:53:47 PM	SiCl4 MFC set to  0.000000
10/7/2010	4:53:47 PM	Tube furnace set to 0
10/7/2010	4:53:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2010	4:54:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2010	4:54:53 PM	Recipe started at 4:54 PM
10/7/2010	4:54:53 PM	Helium valve closed
10/7/2010	4:54:53 PM	H2 valve closed
10/7/2010	4:54:53 PM	BCl3 valve closed
10/7/2010	4:54:53 PM	PH3 valve closed
10/7/2010	4:54:53 PM	SiCl4 pre valve closed
10/7/2010	4:54:53 PM	SiCl4 post valve closed
10/7/2010	4:54:53 PM	Main Vac valve closed
10/7/2010	4:54:53 PM	Bubbler valve closed
10/7/2010	4:54:53 PM	Bypass valve opened
10/7/2010	4:54:53 PM	Helium MFC set to  0.000000
10/7/2010	4:54:53 PM	H2 MFC set to  0.000000
10/7/2010	4:54:53 PM	BCl3 MFC set to  0.000000
10/7/2010	4:54:53 PM	PHl3 MFC set to  0.000000
10/7/2010	4:54:53 PM	SiCl4 MFC set to  0.000000
10/7/2010	4:54:53 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	4:54:53 PM	Tube furnace set to 0
10/7/2010	4:55:03 PM	Run aborted at 4:55 PM
10/7/2010	4:55:03 PM	Helium valve closed
10/7/2010	4:55:03 PM	H2 valve closed
10/7/2010	4:55:03 PM	BCl3 valve closed
10/7/2010	4:55:03 PM	PH3 valve closed
10/7/2010	4:55:03 PM	SiCl4 pre valve closed
10/7/2010	4:55:03 PM	SiCl4 post valve closed
10/7/2010	4:55:03 PM	Bypass valve closed
10/7/2010	4:55:03 PM	Main Vac valve closed
10/7/2010	4:55:03 PM	Bubbler valve closed
10/7/2010	4:55:03 PM	Helium MFC set to  0.000000
10/7/2010	4:55:03 PM	H2 MFC set to  0.000000
10/7/2010	4:55:03 PM	BCl3 MFC set to  0.000000
10/7/2010	4:55:03 PM	PHl3 MFC set to  0.000000
10/7/2010	4:55:03 PM	SiCl4 MFC set to  0.000000
10/7/2010	4:55:03 PM	Tube furnace set to 0
10/7/2010	4:55:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2010	4:58:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2010	4:58:00 PM	Recipe started at 4:58 PM
10/7/2010	4:58:00 PM	Helium valve closed
10/7/2010	4:58:00 PM	H2 valve closed
10/7/2010	4:58:00 PM	BCl3 valve closed
10/7/2010	4:58:00 PM	PH3 valve closed
10/7/2010	4:58:00 PM	SiCl4 pre valve closed
10/7/2010	4:58:00 PM	SiCl4 post valve closed
10/7/2010	4:58:00 PM	Main Vac valve closed
10/7/2010	4:58:00 PM	Bubbler valve closed
10/7/2010	4:58:00 PM	Bypass valve opened
10/7/2010	4:58:00 PM	Helium MFC set to  0.000000
10/7/2010	4:58:00 PM	H2 MFC set to  0.000000
10/7/2010	4:58:00 PM	BCl3 MFC set to  0.000000
10/7/2010	4:58:00 PM	PHl3 MFC set to  0.000000
10/7/2010	4:58:00 PM	SiCl4 MFC set to  0.000000
10/7/2010	4:58:00 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	4:58:00 PM	Tube furnace set to 0
10/7/2010	4:58:59 PM	Helium valve closed
10/7/2010	4:58:59 PM	H2 valve closed
10/7/2010	4:58:59 PM	BCl3 valve closed
10/7/2010	4:58:59 PM	PH3 valve closed
10/7/2010	4:58:59 PM	SiCl4 pre valve closed
10/7/2010	4:58:59 PM	SiCl4 post valve closed
10/7/2010	4:58:59 PM	Bubbler valve closed
10/7/2010	4:58:59 PM	Main Vac valve opened
10/7/2010	4:58:59 PM	Bypass valve opened
10/7/2010	4:58:59 PM	Helium MFC set to  0.000000
10/7/2010	4:59:00 PM	H2 MFC set to  0.000000
10/7/2010	4:59:00 PM	BCl3 MFC set to  0.000000
10/7/2010	4:59:00 PM	PHl3 MFC set to  0.000000
10/7/2010	4:59:00 PM	SiCl4 MFC set to  0.000000
10/7/2010	4:59:00 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	4:59:00 PM	Tube furnace set to 0
10/7/2010	4:59:00 PM	Run finished at 4:59 PM
10/7/2010	4:59:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2010	4:59:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/7/2010	5:00:10 PM	Recipe started at 5:00 PM
10/7/2010	5:00:10 PM	Helium valve closed
10/7/2010	5:00:10 PM	H2 valve closed
10/7/2010	5:00:10 PM	BCl3 valve closed
10/7/2010	5:00:10 PM	PH3 valve closed
10/7/2010	5:00:10 PM	SiCl4 pre valve closed
10/7/2010	5:00:10 PM	SiCl4 post valve closed
10/7/2010	5:00:10 PM	Main Vac valve closed
10/7/2010	5:00:10 PM	Bubbler valve closed
10/7/2010	5:00:10 PM	Bypass valve opened
10/7/2010	5:00:10 PM	Helium MFC set to  0.000000
10/7/2010	5:00:10 PM	H2 MFC set to  0.000000
10/7/2010	5:00:10 PM	BCl3 MFC set to  0.000000
10/7/2010	5:00:10 PM	PHl3 MFC set to  0.000000
10/7/2010	5:00:10 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:00:10 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:00:10 PM	Tube furnace set to 0
10/7/2010	5:00:10 PM	Helium valve closed
10/7/2010	5:00:10 PM	H2 valve closed
10/7/2010	5:00:10 PM	BCl3 valve closed
10/7/2010	5:00:10 PM	PH3 valve closed
10/7/2010	5:00:10 PM	SiCl4 pre valve closed
10/7/2010	5:00:10 PM	SiCl4 post valve closed
10/7/2010	5:00:10 PM	Bubbler valve closed
10/7/2010	5:00:10 PM	Main Vac valve opened
10/7/2010	5:00:10 PM	Bypass valve opened
10/7/2010	5:00:10 PM	Helium MFC set to  0.000000
10/7/2010	5:00:10 PM	H2 MFC set to  0.000000
10/7/2010	5:00:10 PM	BCl3 MFC set to  0.000000
10/7/2010	5:00:10 PM	PHl3 MFC set to  0.000000
10/7/2010	5:00:10 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:00:10 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:00:10 PM	Tube furnace set to 0
10/7/2010	5:01:10 PM	H2 valve closed
10/7/2010	5:01:10 PM	BCl3 valve closed
10/7/2010	5:01:10 PM	PH3 valve closed
10/7/2010	5:01:10 PM	SiCl4 pre valve closed
10/7/2010	5:01:10 PM	SiCl4 post valve closed
10/7/2010	5:01:10 PM	Bubbler valve closed
10/7/2010	5:01:10 PM	Helium valve opened
10/7/2010	5:01:10 PM	Main Vac valve opened
10/7/2010	5:01:10 PM	Bypass valve opened
10/7/2010	5:01:10 PM	Helium MFC set to  100.000000
10/7/2010	5:01:10 PM	H2 MFC set to  0.000000
10/7/2010	5:01:10 PM	BCl3 MFC set to  0.000000
10/7/2010	5:01:10 PM	PHl3 MFC set to  0.000000
10/7/2010	5:01:10 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:01:10 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:01:10 PM	Tube furnace set to 0
10/7/2010	5:02:11 PM	Helium valve closed
10/7/2010	5:02:11 PM	H2 valve closed
10/7/2010	5:02:11 PM	BCl3 valve closed
10/7/2010	5:02:11 PM	PH3 valve closed
10/7/2010	5:02:11 PM	SiCl4 pre valve closed
10/7/2010	5:02:11 PM	SiCl4 post valve closed
10/7/2010	5:02:11 PM	Bubbler valve closed
10/7/2010	5:02:11 PM	Main Vac valve opened
10/7/2010	5:02:11 PM	Bypass valve opened
10/7/2010	5:02:11 PM	Helium MFC set to  0.000000
10/7/2010	5:02:11 PM	H2 MFC set to  0.000000
10/7/2010	5:02:11 PM	BCl3 MFC set to  0.000000
10/7/2010	5:02:11 PM	PHl3 MFC set to  0.000000
10/7/2010	5:02:11 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:02:11 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:02:11 PM	Tube furnace set to 0
10/7/2010	5:03:11 PM	H2 valve closed
10/7/2010	5:03:11 PM	BCl3 valve closed
10/7/2010	5:03:11 PM	PH3 valve closed
10/7/2010	5:03:11 PM	SiCl4 pre valve closed
10/7/2010	5:03:11 PM	SiCl4 post valve closed
10/7/2010	5:03:11 PM	Bubbler valve closed
10/7/2010	5:03:11 PM	Helium valve opened
10/7/2010	5:03:11 PM	Main Vac valve opened
10/7/2010	5:03:11 PM	Bypass valve opened
10/7/2010	5:03:11 PM	Helium MFC set to  100.000000
10/7/2010	5:03:11 PM	H2 MFC set to  0.000000
10/7/2010	5:03:11 PM	BCl3 MFC set to  0.000000
10/7/2010	5:03:11 PM	PHl3 MFC set to  0.000000
10/7/2010	5:03:11 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:03:11 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:03:11 PM	Tube furnace set to 0
10/7/2010	5:04:11 PM	Helium valve closed
10/7/2010	5:04:11 PM	H2 valve closed
10/7/2010	5:04:11 PM	BCl3 valve closed
10/7/2010	5:04:11 PM	PH3 valve closed
10/7/2010	5:04:11 PM	SiCl4 pre valve closed
10/7/2010	5:04:11 PM	SiCl4 post valve closed
10/7/2010	5:04:11 PM	Bubbler valve closed
10/7/2010	5:04:11 PM	Main Vac valve opened
10/7/2010	5:04:11 PM	Bypass valve opened
10/7/2010	5:04:11 PM	Helium MFC set to  0.000000
10/7/2010	5:04:11 PM	H2 MFC set to  0.000000
10/7/2010	5:04:11 PM	BCl3 MFC set to  0.000000
10/7/2010	5:04:11 PM	PHl3 MFC set to  0.000000
10/7/2010	5:04:11 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:04:11 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:04:11 PM	Tube furnace set to 0
10/7/2010	5:05:11 PM	H2 valve closed
10/7/2010	5:05:11 PM	BCl3 valve closed
10/7/2010	5:05:11 PM	PH3 valve closed
10/7/2010	5:05:11 PM	SiCl4 pre valve closed
10/7/2010	5:05:11 PM	SiCl4 post valve closed
10/7/2010	5:05:11 PM	Bubbler valve closed
10/7/2010	5:05:11 PM	Helium valve opened
10/7/2010	5:05:11 PM	Main Vac valve opened
10/7/2010	5:05:11 PM	Bypass valve opened
10/7/2010	5:05:11 PM	Helium MFC set to  100.000000
10/7/2010	5:05:11 PM	H2 MFC set to  0.000000
10/7/2010	5:05:11 PM	BCl3 MFC set to  0.000000
10/7/2010	5:05:11 PM	PHl3 MFC set to  0.000000
10/7/2010	5:05:11 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:05:11 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:05:11 PM	Tube furnace set to 0
10/7/2010	5:06:11 PM	Helium valve closed
10/7/2010	5:06:11 PM	H2 valve closed
10/7/2010	5:06:11 PM	BCl3 valve closed
10/7/2010	5:06:11 PM	PH3 valve closed
10/7/2010	5:06:11 PM	SiCl4 pre valve closed
10/7/2010	5:06:11 PM	SiCl4 post valve closed
10/7/2010	5:06:11 PM	Bubbler valve closed
10/7/2010	5:06:11 PM	Main Vac valve opened
10/7/2010	5:06:11 PM	Bypass valve opened
10/7/2010	5:06:11 PM	Helium MFC set to  0.000000
10/7/2010	5:06:11 PM	H2 MFC set to  0.000000
10/7/2010	5:06:11 PM	BCl3 MFC set to  0.000000
10/7/2010	5:06:11 PM	PHl3 MFC set to  0.000000
10/7/2010	5:06:11 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:06:11 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:06:11 PM	Tube furnace set to 0
10/7/2010	5:07:11 PM	H2 valve closed
10/7/2010	5:07:11 PM	BCl3 valve closed
10/7/2010	5:07:11 PM	PH3 valve closed
10/7/2010	5:07:11 PM	SiCl4 pre valve closed
10/7/2010	5:07:12 PM	SiCl4 post valve closed
10/7/2010	5:07:12 PM	Bubbler valve closed
10/7/2010	5:07:12 PM	Helium valve opened
10/7/2010	5:07:12 PM	Main Vac valve opened
10/7/2010	5:07:12 PM	Bypass valve opened
10/7/2010	5:07:12 PM	Helium MFC set to  100.000000
10/7/2010	5:07:12 PM	H2 MFC set to  0.000000
10/7/2010	5:07:12 PM	BCl3 MFC set to  0.000000
10/7/2010	5:07:12 PM	PHl3 MFC set to  0.000000
10/7/2010	5:07:12 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:07:12 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:07:12 PM	Tube furnace set to 0
10/7/2010	5:08:12 PM	Helium valve closed
10/7/2010	5:08:12 PM	H2 valve closed
10/7/2010	5:08:12 PM	BCl3 valve closed
10/7/2010	5:08:12 PM	PH3 valve closed
10/7/2010	5:08:12 PM	SiCl4 pre valve closed
10/7/2010	5:08:12 PM	SiCl4 post valve closed
10/7/2010	5:08:12 PM	Bubbler valve closed
10/7/2010	5:08:12 PM	Main Vac valve opened
10/7/2010	5:08:12 PM	Bypass valve opened
10/7/2010	5:08:12 PM	Helium MFC set to  0.000000
10/7/2010	5:08:12 PM	H2 MFC set to  0.000000
10/7/2010	5:08:12 PM	BCl3 MFC set to  0.000000
10/7/2010	5:08:12 PM	PHl3 MFC set to  0.000000
10/7/2010	5:08:12 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:08:12 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:08:12 PM	Tube furnace set to 0
10/7/2010	5:09:12 PM	H2 valve closed
10/7/2010	5:09:12 PM	BCl3 valve closed
10/7/2010	5:09:12 PM	PH3 valve closed
10/7/2010	5:09:12 PM	SiCl4 pre valve closed
10/7/2010	5:09:12 PM	SiCl4 post valve closed
10/7/2010	5:09:12 PM	Bubbler valve closed
10/7/2010	5:09:12 PM	Helium valve opened
10/7/2010	5:09:12 PM	Main Vac valve opened
10/7/2010	5:09:12 PM	Bypass valve opened
10/7/2010	5:09:12 PM	Helium MFC set to  100.000000
10/7/2010	5:09:12 PM	H2 MFC set to  0.000000
10/7/2010	5:09:12 PM	BCl3 MFC set to  0.000000
10/7/2010	5:09:12 PM	PHl3 MFC set to  0.000000
10/7/2010	5:09:12 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:09:12 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:09:12 PM	Tube furnace set to 0
10/7/2010	5:10:12 PM	Helium valve closed
10/7/2010	5:10:12 PM	H2 valve closed
10/7/2010	5:10:12 PM	BCl3 valve closed
10/7/2010	5:10:12 PM	PH3 valve closed
10/7/2010	5:10:12 PM	SiCl4 pre valve closed
10/7/2010	5:10:12 PM	SiCl4 post valve closed
10/7/2010	5:10:12 PM	Bubbler valve closed
10/7/2010	5:10:12 PM	Main Vac valve opened
10/7/2010	5:10:12 PM	Bypass valve opened
10/7/2010	5:10:12 PM	Helium MFC set to  0.000000
10/7/2010	5:10:12 PM	H2 MFC set to  0.000000
10/7/2010	5:10:12 PM	BCl3 MFC set to  0.000000
10/7/2010	5:10:12 PM	PHl3 MFC set to  0.000000
10/7/2010	5:10:12 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:10:12 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:10:12 PM	Tube furnace set to 0
10/7/2010	5:11:12 PM	H2 valve closed
10/7/2010	5:11:12 PM	BCl3 valve closed
10/7/2010	5:11:12 PM	PH3 valve closed
10/7/2010	5:11:12 PM	SiCl4 pre valve closed
10/7/2010	5:11:12 PM	SiCl4 post valve closed
10/7/2010	5:11:12 PM	Bubbler valve closed
10/7/2010	5:11:12 PM	Helium valve opened
10/7/2010	5:11:12 PM	Main Vac valve opened
10/7/2010	5:11:12 PM	Bypass valve opened
10/7/2010	5:11:12 PM	Helium MFC set to  100.000000
10/7/2010	5:11:12 PM	H2 MFC set to  0.000000
10/7/2010	5:11:12 PM	BCl3 MFC set to  0.000000
10/7/2010	5:11:12 PM	PHl3 MFC set to  0.000000
10/7/2010	5:11:12 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:11:12 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:11:12 PM	Tube furnace set to 0
10/7/2010	5:12:12 PM	Helium valve closed
10/7/2010	5:12:12 PM	H2 valve closed
10/7/2010	5:12:12 PM	BCl3 valve closed
10/7/2010	5:12:12 PM	PH3 valve closed
10/7/2010	5:12:12 PM	SiCl4 pre valve closed
10/7/2010	5:12:12 PM	SiCl4 post valve closed
10/7/2010	5:12:12 PM	Bubbler valve closed
10/7/2010	5:12:12 PM	Main Vac valve opened
10/7/2010	5:12:12 PM	Bypass valve opened
10/7/2010	5:12:12 PM	Helium MFC set to  0.000000
10/7/2010	5:12:12 PM	H2 MFC set to  0.000000
10/7/2010	5:12:12 PM	BCl3 MFC set to  0.000000
10/7/2010	5:12:12 PM	PHl3 MFC set to  0.000000
10/7/2010	5:12:12 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:12:13 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:12:13 PM	Tube furnace set to 0
10/7/2010	5:13:13 PM	H2 valve closed
10/7/2010	5:13:13 PM	BCl3 valve closed
10/7/2010	5:13:13 PM	PH3 valve closed
10/7/2010	5:13:13 PM	SiCl4 pre valve closed
10/7/2010	5:13:13 PM	SiCl4 post valve closed
10/7/2010	5:13:13 PM	Bubbler valve closed
10/7/2010	5:13:13 PM	Helium valve opened
10/7/2010	5:13:13 PM	Main Vac valve opened
10/7/2010	5:13:13 PM	Bypass valve opened
10/7/2010	5:13:13 PM	Helium MFC set to  100.000000
10/7/2010	5:13:13 PM	H2 MFC set to  0.000000
10/7/2010	5:13:13 PM	BCl3 MFC set to  0.000000
10/7/2010	5:13:13 PM	PHl3 MFC set to  0.000000
10/7/2010	5:13:13 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:13:13 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:13:13 PM	Tube furnace set to 0
10/7/2010	5:14:13 PM	Helium valve closed
10/7/2010	5:14:13 PM	H2 valve closed
10/7/2010	5:14:13 PM	BCl3 valve closed
10/7/2010	5:14:13 PM	PH3 valve closed
10/7/2010	5:14:13 PM	SiCl4 pre valve closed
10/7/2010	5:14:13 PM	SiCl4 post valve closed
10/7/2010	5:14:13 PM	Bubbler valve closed
10/7/2010	5:14:13 PM	Main Vac valve opened
10/7/2010	5:14:13 PM	Bypass valve opened
10/7/2010	5:14:13 PM	Helium MFC set to  0.000000
10/7/2010	5:14:13 PM	H2 MFC set to  0.000000
10/7/2010	5:14:13 PM	BCl3 MFC set to  0.000000
10/7/2010	5:14:13 PM	PHl3 MFC set to  0.000000
10/7/2010	5:14:13 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:14:13 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:14:13 PM	Tube furnace set to 0
10/7/2010	5:15:13 PM	H2 valve closed
10/7/2010	5:15:13 PM	BCl3 valve closed
10/7/2010	5:15:13 PM	PH3 valve closed
10/7/2010	5:15:13 PM	SiCl4 pre valve closed
10/7/2010	5:15:13 PM	SiCl4 post valve closed
10/7/2010	5:15:13 PM	Bubbler valve closed
10/7/2010	5:15:13 PM	Helium valve opened
10/7/2010	5:15:13 PM	Main Vac valve opened
10/7/2010	5:15:13 PM	Bypass valve opened
10/7/2010	5:15:13 PM	Helium MFC set to  100.000000
10/7/2010	5:15:13 PM	H2 MFC set to  0.000000
10/7/2010	5:15:13 PM	BCl3 MFC set to  0.000000
10/7/2010	5:15:13 PM	PHl3 MFC set to  0.000000
10/7/2010	5:15:13 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:15:13 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:15:13 PM	Tube furnace set to 0
10/7/2010	5:16:13 PM	Helium valve closed
10/7/2010	5:16:13 PM	H2 valve closed
10/7/2010	5:16:13 PM	BCl3 valve closed
10/7/2010	5:16:13 PM	PH3 valve closed
10/7/2010	5:16:13 PM	SiCl4 pre valve closed
10/7/2010	5:16:13 PM	SiCl4 post valve closed
10/7/2010	5:16:13 PM	Bubbler valve closed
10/7/2010	5:16:13 PM	Main Vac valve opened
10/7/2010	5:16:13 PM	Bypass valve opened
10/7/2010	5:16:13 PM	Helium MFC set to  0.000000
10/7/2010	5:16:13 PM	H2 MFC set to  0.000000
10/7/2010	5:16:13 PM	BCl3 MFC set to  0.000000
10/7/2010	5:16:13 PM	PHl3 MFC set to  0.000000
10/7/2010	5:16:13 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:16:13 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:16:13 PM	Tube furnace set to 0
10/7/2010	5:17:13 PM	H2 valve closed
10/7/2010	5:17:13 PM	BCl3 valve closed
10/7/2010	5:17:13 PM	PH3 valve closed
10/7/2010	5:17:13 PM	SiCl4 pre valve closed
10/7/2010	5:17:13 PM	SiCl4 post valve closed
10/7/2010	5:17:13 PM	Bubbler valve closed
10/7/2010	5:17:13 PM	Helium valve opened
10/7/2010	5:17:13 PM	Main Vac valve opened
10/7/2010	5:17:13 PM	Bypass valve opened
10/7/2010	5:17:13 PM	Helium MFC set to  100.000000
10/7/2010	5:17:13 PM	H2 MFC set to  0.000000
10/7/2010	5:17:13 PM	BCl3 MFC set to  0.000000
10/7/2010	5:17:13 PM	PHl3 MFC set to  0.000000
10/7/2010	5:17:13 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:17:13 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:17:14 PM	Tube furnace set to 0
10/7/2010	5:18:14 PM	Helium valve closed
10/7/2010	5:18:14 PM	H2 valve closed
10/7/2010	5:18:14 PM	BCl3 valve closed
10/7/2010	5:18:14 PM	PH3 valve closed
10/7/2010	5:18:14 PM	SiCl4 pre valve closed
10/7/2010	5:18:14 PM	SiCl4 post valve closed
10/7/2010	5:18:14 PM	Bubbler valve closed
10/7/2010	5:18:14 PM	Main Vac valve opened
10/7/2010	5:18:14 PM	Bypass valve opened
10/7/2010	5:18:14 PM	Helium MFC set to  0.000000
10/7/2010	5:18:14 PM	H2 MFC set to  0.000000
10/7/2010	5:18:14 PM	BCl3 MFC set to  0.000000
10/7/2010	5:18:14 PM	PHl3 MFC set to  0.000000
10/7/2010	5:18:14 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:18:14 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:18:14 PM	Tube furnace set to 0
10/7/2010	5:19:14 PM	H2 valve closed
10/7/2010	5:19:14 PM	BCl3 valve closed
10/7/2010	5:19:14 PM	PH3 valve closed
10/7/2010	5:19:14 PM	SiCl4 pre valve closed
10/7/2010	5:19:14 PM	SiCl4 post valve closed
10/7/2010	5:19:14 PM	Bubbler valve closed
10/7/2010	5:19:14 PM	Helium valve opened
10/7/2010	5:19:14 PM	Main Vac valve opened
10/7/2010	5:19:14 PM	Bypass valve opened
10/7/2010	5:19:14 PM	Helium MFC set to  100.000000
10/7/2010	5:19:14 PM	H2 MFC set to  0.000000
10/7/2010	5:19:14 PM	BCl3 MFC set to  0.000000
10/7/2010	5:19:14 PM	PHl3 MFC set to  0.000000
10/7/2010	5:19:14 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:19:14 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:19:14 PM	Tube furnace set to 0
10/7/2010	5:20:14 PM	Helium valve closed
10/7/2010	5:20:14 PM	H2 valve closed
10/7/2010	5:20:14 PM	BCl3 valve closed
10/7/2010	5:20:14 PM	PH3 valve closed
10/7/2010	5:20:14 PM	SiCl4 pre valve closed
10/7/2010	5:20:14 PM	SiCl4 post valve closed
10/7/2010	5:20:14 PM	Bubbler valve closed
10/7/2010	5:20:14 PM	Main Vac valve opened
10/7/2010	5:20:14 PM	Bypass valve opened
10/7/2010	5:20:14 PM	Helium MFC set to  0.000000
10/7/2010	5:20:14 PM	H2 MFC set to  0.000000
10/7/2010	5:20:14 PM	BCl3 MFC set to  0.000000
10/7/2010	5:20:14 PM	PHl3 MFC set to  0.000000
10/7/2010	5:20:14 PM	SiCl4 MFC set to  0.000000
10/7/2010	5:20:14 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	5:20:14 PM	Tube furnace set to 0
10/7/2010	5:20:15 PM	Run finished at 5:20 PM
10/7/2010	5:20:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/7/2010	6:29:12 PM	Tube furnace set to 100
10/7/2010	6:29:14 PM	Helium valve opened
10/7/2010	6:29:18 PM	Helium MFC set to  100.000000
10/7/2010	6:34:22 PM	Helium valve closed
10/7/2010	6:34:24 PM	Helium MFC set to  0.000000
10/7/2010	6:36:24 PM	Tube furnace set to 0
10/7/2010	6:36:28 PM	Recipe started at 6:36 PM
10/7/2010	6:36:28 PM	Helium valve closed
10/7/2010	6:36:28 PM	BCl3 valve closed
10/7/2010	6:36:28 PM	PH3 valve closed
10/7/2010	6:36:28 PM	SiCl4 pre valve closed
10/7/2010	6:36:28 PM	SiCl4 post valve closed
10/7/2010	6:36:28 PM	Main Vac valve closed
10/7/2010	6:36:28 PM	Bypass valve closed
10/7/2010	6:36:28 PM	Bubbler valve closed
10/7/2010	6:36:28 PM	H2 valve opened
10/7/2010	6:36:28 PM	Helium MFC set to  0.000000
10/7/2010	6:36:28 PM	H2 MFC set to  500.000000
10/7/2010	6:36:28 PM	BCl3 MFC set to  0.000000
10/7/2010	6:36:28 PM	PHl3 MFC set to  0.000000
10/7/2010	6:36:28 PM	SiCl4 MFC set to  0.000000
10/7/2010	6:36:28 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	6:36:28 PM	Tube furnace set to 100
10/7/2010	6:37:49 PM	Helium valve closed
10/7/2010	6:37:49 PM	BCl3 valve closed
10/7/2010	6:37:49 PM	PH3 valve closed
10/7/2010	6:37:49 PM	SiCl4 pre valve closed
10/7/2010	6:37:49 PM	SiCl4 post valve closed
10/7/2010	6:37:49 PM	Main Vac valve closed
10/7/2010	6:37:49 PM	Bypass valve closed
10/7/2010	6:37:49 PM	H2 valve opened
10/7/2010	6:37:49 PM	Bubbler valve opened
10/7/2010	6:37:49 PM	Helium MFC set to  0.000000
10/7/2010	6:37:49 PM	H2 MFC set to  500.000000
10/7/2010	6:37:49 PM	BCl3 MFC set to  0.000000
10/7/2010	6:37:49 PM	PHl3 MFC set to  0.000000
10/7/2010	6:37:49 PM	SiCl4 MFC set to  0.000000
10/7/2010	6:37:49 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	6:37:49 PM	Tube furnace set to 1000
10/7/2010	6:57:49 PM	Helium valve closed
10/7/2010	6:57:49 PM	PH3 valve closed
10/7/2010	6:57:49 PM	Main Vac valve closed
10/7/2010	6:57:49 PM	Bypass valve closed
10/7/2010	6:57:49 PM	H2 valve opened
10/7/2010	6:57:49 PM	BCl3 valve opened
10/7/2010	6:57:49 PM	SiCl4 pre valve opened
10/7/2010	6:57:49 PM	SiCl4 post valve opened
10/7/2010	6:57:49 PM	Bubbler valve opened
10/7/2010	6:57:49 PM	Helium MFC set to  0.000000
10/7/2010	6:57:49 PM	H2 MFC set to  500.000000
10/7/2010	6:57:49 PM	BCl3 MFC set to  10.000000
10/7/2010	6:57:49 PM	PHl3 MFC set to  0.000000
10/7/2010	6:57:49 PM	SiCl4 MFC set to  50.000000
10/7/2010	6:57:49 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	6:57:49 PM	Tube furnace set to 1000
10/7/2010	7:09:49 PM	H2 valve closed
10/7/2010	7:09:49 PM	BCl3 valve closed
10/7/2010	7:09:49 PM	PH3 valve closed
10/7/2010	7:09:49 PM	SiCl4 pre valve closed
10/7/2010	7:09:49 PM	SiCl4 post valve closed
10/7/2010	7:09:49 PM	Main Vac valve closed
10/7/2010	7:09:49 PM	Bypass valve closed
10/7/2010	7:09:49 PM	Helium valve opened
10/7/2010	7:09:49 PM	Bubbler valve opened
10/7/2010	7:09:49 PM	Helium MFC set to  500.000000
10/7/2010	7:09:49 PM	H2 MFC set to  0.000000
10/7/2010	7:09:49 PM	BCl3 MFC set to  0.000000
10/7/2010	7:09:49 PM	PHl3 MFC set to  0.000000
10/7/2010	7:09:49 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:09:49 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:09:49 PM	Tube furnace set to 0
10/7/2010	7:29:49 PM	Helium valve closed
10/7/2010	7:29:49 PM	H2 valve closed
10/7/2010	7:29:49 PM	BCl3 valve closed
10/7/2010	7:29:49 PM	PH3 valve closed
10/7/2010	7:29:49 PM	SiCl4 pre valve closed
10/7/2010	7:29:49 PM	SiCl4 post valve closed
10/7/2010	7:29:49 PM	Main Vac valve closed
10/7/2010	7:29:49 PM	Bypass valve closed
10/7/2010	7:29:49 PM	Bubbler valve closed
10/7/2010	7:29:49 PM	Helium MFC set to  0.000000
10/7/2010	7:29:49 PM	H2 MFC set to  0.000000
10/7/2010	7:29:49 PM	BCl3 MFC set to  0.000000
10/7/2010	7:29:49 PM	PHl3 MFC set to  0.000000
10/7/2010	7:29:49 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:29:49 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:29:49 PM	Tube furnace set to 0
10/7/2010	7:29:49 PM	Run finished at 7:29 PM
10/7/2010	7:41:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2010	7:41:51 PM	Recipe started at 7:41 PM
10/7/2010	7:41:51 PM	Helium valve closed
10/7/2010	7:41:51 PM	H2 valve closed
10/7/2010	7:41:51 PM	BCl3 valve closed
10/7/2010	7:41:51 PM	PH3 valve closed
10/7/2010	7:41:51 PM	SiCl4 pre valve closed
10/7/2010	7:41:51 PM	SiCl4 post valve closed
10/7/2010	7:41:51 PM	Main Vac valve closed
10/7/2010	7:41:51 PM	Bubbler valve closed
10/7/2010	7:41:51 PM	Bypass valve opened
10/7/2010	7:41:51 PM	Helium MFC set to  0.000000
10/7/2010	7:41:51 PM	H2 MFC set to  0.000000
10/7/2010	7:41:51 PM	BCl3 MFC set to  0.000000
10/7/2010	7:41:51 PM	PHl3 MFC set to  0.000000
10/7/2010	7:41:51 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:41:51 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:41:51 PM	Tube furnace set to 0
10/7/2010	7:42:39 PM	Helium valve closed
10/7/2010	7:42:39 PM	H2 valve closed
10/7/2010	7:42:39 PM	BCl3 valve closed
10/7/2010	7:42:39 PM	PH3 valve closed
10/7/2010	7:42:39 PM	SiCl4 pre valve closed
10/7/2010	7:42:39 PM	SiCl4 post valve closed
10/7/2010	7:42:39 PM	Bubbler valve closed
10/7/2010	7:42:39 PM	Main Vac valve opened
10/7/2010	7:42:39 PM	Bypass valve opened
10/7/2010	7:42:39 PM	Helium MFC set to  0.000000
10/7/2010	7:42:39 PM	H2 MFC set to  0.000000
10/7/2010	7:42:39 PM	BCl3 MFC set to  0.000000
10/7/2010	7:42:39 PM	PHl3 MFC set to  0.000000
10/7/2010	7:42:39 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:42:39 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:42:39 PM	Tube furnace set to 0
10/7/2010	7:42:40 PM	Run finished at 7:42 PM
10/7/2010	7:42:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2010	7:45:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/7/2010	7:45:31 PM	Recipe started at 7:45 PM
10/7/2010	7:45:31 PM	Helium valve closed
10/7/2010	7:45:31 PM	H2 valve closed
10/7/2010	7:45:31 PM	BCl3 valve closed
10/7/2010	7:45:31 PM	PH3 valve closed
10/7/2010	7:45:31 PM	SiCl4 pre valve closed
10/7/2010	7:45:31 PM	SiCl4 post valve closed
10/7/2010	7:45:31 PM	Main Vac valve closed
10/7/2010	7:45:31 PM	Bubbler valve closed
10/7/2010	7:45:31 PM	Bypass valve opened
10/7/2010	7:45:31 PM	Helium MFC set to  0.000000
10/7/2010	7:45:31 PM	H2 MFC set to  0.000000
10/7/2010	7:45:31 PM	BCl3 MFC set to  0.000000
10/7/2010	7:45:31 PM	PHl3 MFC set to  0.000000
10/7/2010	7:45:31 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:45:31 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:45:31 PM	Tube furnace set to 0
10/7/2010	7:45:31 PM	Helium valve closed
10/7/2010	7:45:31 PM	H2 valve closed
10/7/2010	7:45:31 PM	BCl3 valve closed
10/7/2010	7:45:31 PM	PH3 valve closed
10/7/2010	7:45:31 PM	SiCl4 pre valve closed
10/7/2010	7:45:31 PM	SiCl4 post valve closed
10/7/2010	7:45:31 PM	Bubbler valve closed
10/7/2010	7:45:31 PM	Main Vac valve opened
10/7/2010	7:45:31 PM	Bypass valve opened
10/7/2010	7:45:31 PM	Helium MFC set to  0.000000
10/7/2010	7:45:31 PM	H2 MFC set to  0.000000
10/7/2010	7:45:31 PM	BCl3 MFC set to  0.000000
10/7/2010	7:45:31 PM	PHl3 MFC set to  0.000000
10/7/2010	7:45:31 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:45:31 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:45:31 PM	Tube furnace set to 0
10/7/2010	7:46:31 PM	H2 valve closed
10/7/2010	7:46:31 PM	BCl3 valve closed
10/7/2010	7:46:31 PM	PH3 valve closed
10/7/2010	7:46:31 PM	SiCl4 pre valve closed
10/7/2010	7:46:31 PM	SiCl4 post valve closed
10/7/2010	7:46:31 PM	Bubbler valve closed
10/7/2010	7:46:31 PM	Helium valve opened
10/7/2010	7:46:31 PM	Main Vac valve opened
10/7/2010	7:46:31 PM	Bypass valve opened
10/7/2010	7:46:31 PM	Helium MFC set to  100.000000
10/7/2010	7:46:31 PM	H2 MFC set to  0.000000
10/7/2010	7:46:31 PM	BCl3 MFC set to  0.000000
10/7/2010	7:46:31 PM	PHl3 MFC set to  0.000000
10/7/2010	7:46:31 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:46:31 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:46:31 PM	Tube furnace set to 0
10/7/2010	7:47:31 PM	Helium valve closed
10/7/2010	7:47:31 PM	H2 valve closed
10/7/2010	7:47:31 PM	BCl3 valve closed
10/7/2010	7:47:31 PM	PH3 valve closed
10/7/2010	7:47:31 PM	SiCl4 pre valve closed
10/7/2010	7:47:31 PM	SiCl4 post valve closed
10/7/2010	7:47:31 PM	Bubbler valve closed
10/7/2010	7:47:31 PM	Main Vac valve opened
10/7/2010	7:47:31 PM	Bypass valve opened
10/7/2010	7:47:31 PM	Helium MFC set to  0.000000
10/7/2010	7:47:31 PM	H2 MFC set to  0.000000
10/7/2010	7:47:31 PM	BCl3 MFC set to  0.000000
10/7/2010	7:47:31 PM	PHl3 MFC set to  0.000000
10/7/2010	7:47:31 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:47:31 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:47:32 PM	Tube furnace set to 0
10/7/2010	7:48:32 PM	H2 valve closed
10/7/2010	7:48:32 PM	BCl3 valve closed
10/7/2010	7:48:32 PM	PH3 valve closed
10/7/2010	7:48:32 PM	SiCl4 pre valve closed
10/7/2010	7:48:32 PM	SiCl4 post valve closed
10/7/2010	7:48:32 PM	Bubbler valve closed
10/7/2010	7:48:32 PM	Helium valve opened
10/7/2010	7:48:32 PM	Main Vac valve opened
10/7/2010	7:48:32 PM	Bypass valve opened
10/7/2010	7:48:32 PM	Helium MFC set to  100.000000
10/7/2010	7:48:32 PM	H2 MFC set to  0.000000
10/7/2010	7:48:32 PM	BCl3 MFC set to  0.000000
10/7/2010	7:48:32 PM	PHl3 MFC set to  0.000000
10/7/2010	7:48:32 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:48:32 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:48:32 PM	Tube furnace set to 0
10/7/2010	7:49:32 PM	Helium valve closed
10/7/2010	7:49:32 PM	H2 valve closed
10/7/2010	7:49:32 PM	BCl3 valve closed
10/7/2010	7:49:32 PM	PH3 valve closed
10/7/2010	7:49:32 PM	SiCl4 pre valve closed
10/7/2010	7:49:32 PM	SiCl4 post valve closed
10/7/2010	7:49:32 PM	Bubbler valve closed
10/7/2010	7:49:32 PM	Main Vac valve opened
10/7/2010	7:49:32 PM	Bypass valve opened
10/7/2010	7:49:32 PM	Helium MFC set to  0.000000
10/7/2010	7:49:32 PM	H2 MFC set to  0.000000
10/7/2010	7:49:32 PM	BCl3 MFC set to  0.000000
10/7/2010	7:49:32 PM	PHl3 MFC set to  0.000000
10/7/2010	7:49:32 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:49:32 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:49:32 PM	Tube furnace set to 0
10/7/2010	7:50:32 PM	H2 valve closed
10/7/2010	7:50:32 PM	BCl3 valve closed
10/7/2010	7:50:32 PM	PH3 valve closed
10/7/2010	7:50:32 PM	SiCl4 pre valve closed
10/7/2010	7:50:32 PM	SiCl4 post valve closed
10/7/2010	7:50:32 PM	Bubbler valve closed
10/7/2010	7:50:32 PM	Helium valve opened
10/7/2010	7:50:32 PM	Main Vac valve opened
10/7/2010	7:50:32 PM	Bypass valve opened
10/7/2010	7:50:32 PM	Helium MFC set to  100.000000
10/7/2010	7:50:32 PM	H2 MFC set to  0.000000
10/7/2010	7:50:32 PM	BCl3 MFC set to  0.000000
10/7/2010	7:50:32 PM	PHl3 MFC set to  0.000000
10/7/2010	7:50:32 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:50:32 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:50:32 PM	Tube furnace set to 0
10/7/2010	7:51:32 PM	Helium valve closed
10/7/2010	7:51:32 PM	H2 valve closed
10/7/2010	7:51:32 PM	BCl3 valve closed
10/7/2010	7:51:32 PM	PH3 valve closed
10/7/2010	7:51:32 PM	SiCl4 pre valve closed
10/7/2010	7:51:32 PM	SiCl4 post valve closed
10/7/2010	7:51:32 PM	Bubbler valve closed
10/7/2010	7:51:32 PM	Main Vac valve opened
10/7/2010	7:51:32 PM	Bypass valve opened
10/7/2010	7:51:32 PM	Helium MFC set to  0.000000
10/7/2010	7:51:32 PM	H2 MFC set to  0.000000
10/7/2010	7:51:32 PM	BCl3 MFC set to  0.000000
10/7/2010	7:51:32 PM	PHl3 MFC set to  0.000000
10/7/2010	7:51:32 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:51:32 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:51:32 PM	Tube furnace set to 0
10/7/2010	7:52:32 PM	H2 valve closed
10/7/2010	7:52:32 PM	BCl3 valve closed
10/7/2010	7:52:32 PM	PH3 valve closed
10/7/2010	7:52:32 PM	SiCl4 pre valve closed
10/7/2010	7:52:32 PM	SiCl4 post valve closed
10/7/2010	7:52:32 PM	Bubbler valve closed
10/7/2010	7:52:32 PM	Helium valve opened
10/7/2010	7:52:32 PM	Main Vac valve opened
10/7/2010	7:52:32 PM	Bypass valve opened
10/7/2010	7:52:32 PM	Helium MFC set to  100.000000
10/7/2010	7:52:32 PM	H2 MFC set to  0.000000
10/7/2010	7:52:32 PM	BCl3 MFC set to  0.000000
10/7/2010	7:52:32 PM	PHl3 MFC set to  0.000000
10/7/2010	7:52:32 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:52:32 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:52:33 PM	Tube furnace set to 0
10/7/2010	7:53:33 PM	Helium valve closed
10/7/2010	7:53:33 PM	H2 valve closed
10/7/2010	7:53:33 PM	BCl3 valve closed
10/7/2010	7:53:33 PM	PH3 valve closed
10/7/2010	7:53:33 PM	SiCl4 pre valve closed
10/7/2010	7:53:33 PM	SiCl4 post valve closed
10/7/2010	7:53:33 PM	Bubbler valve closed
10/7/2010	7:53:33 PM	Main Vac valve opened
10/7/2010	7:53:33 PM	Bypass valve opened
10/7/2010	7:53:33 PM	Helium MFC set to  0.000000
10/7/2010	7:53:33 PM	H2 MFC set to  0.000000
10/7/2010	7:53:33 PM	BCl3 MFC set to  0.000000
10/7/2010	7:53:33 PM	PHl3 MFC set to  0.000000
10/7/2010	7:53:33 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:53:33 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:53:33 PM	Tube furnace set to 0
10/7/2010	7:54:33 PM	H2 valve closed
10/7/2010	7:54:33 PM	BCl3 valve closed
10/7/2010	7:54:33 PM	PH3 valve closed
10/7/2010	7:54:33 PM	SiCl4 pre valve closed
10/7/2010	7:54:33 PM	SiCl4 post valve closed
10/7/2010	7:54:33 PM	Bubbler valve closed
10/7/2010	7:54:33 PM	Helium valve opened
10/7/2010	7:54:33 PM	Main Vac valve opened
10/7/2010	7:54:33 PM	Bypass valve opened
10/7/2010	7:54:33 PM	Helium MFC set to  100.000000
10/7/2010	7:54:33 PM	H2 MFC set to  0.000000
10/7/2010	7:54:33 PM	BCl3 MFC set to  0.000000
10/7/2010	7:54:33 PM	PHl3 MFC set to  0.000000
10/7/2010	7:54:33 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:54:33 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:54:33 PM	Tube furnace set to 0
10/7/2010	7:55:33 PM	Helium valve closed
10/7/2010	7:55:33 PM	H2 valve closed
10/7/2010	7:55:33 PM	BCl3 valve closed
10/7/2010	7:55:33 PM	PH3 valve closed
10/7/2010	7:55:33 PM	SiCl4 pre valve closed
10/7/2010	7:55:33 PM	SiCl4 post valve closed
10/7/2010	7:55:33 PM	Bubbler valve closed
10/7/2010	7:55:33 PM	Main Vac valve opened
10/7/2010	7:55:33 PM	Bypass valve opened
10/7/2010	7:55:33 PM	Helium MFC set to  0.000000
10/7/2010	7:55:33 PM	H2 MFC set to  0.000000
10/7/2010	7:55:33 PM	BCl3 MFC set to  0.000000
10/7/2010	7:55:33 PM	PHl3 MFC set to  0.000000
10/7/2010	7:55:33 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:55:33 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:55:33 PM	Tube furnace set to 0
10/7/2010	7:56:33 PM	H2 valve closed
10/7/2010	7:56:33 PM	BCl3 valve closed
10/7/2010	7:56:33 PM	PH3 valve closed
10/7/2010	7:56:33 PM	SiCl4 pre valve closed
10/7/2010	7:56:33 PM	SiCl4 post valve closed
10/7/2010	7:56:33 PM	Bubbler valve closed
10/7/2010	7:56:33 PM	Helium valve opened
10/7/2010	7:56:33 PM	Main Vac valve opened
10/7/2010	7:56:33 PM	Bypass valve opened
10/7/2010	7:56:33 PM	Helium MFC set to  100.000000
10/7/2010	7:56:33 PM	H2 MFC set to  0.000000
10/7/2010	7:56:33 PM	BCl3 MFC set to  0.000000
10/7/2010	7:56:33 PM	PHl3 MFC set to  0.000000
10/7/2010	7:56:33 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:56:33 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:56:33 PM	Tube furnace set to 0
10/7/2010	7:57:33 PM	Helium valve closed
10/7/2010	7:57:33 PM	H2 valve closed
10/7/2010	7:57:33 PM	BCl3 valve closed
10/7/2010	7:57:33 PM	PH3 valve closed
10/7/2010	7:57:33 PM	SiCl4 pre valve closed
10/7/2010	7:57:33 PM	SiCl4 post valve closed
10/7/2010	7:57:33 PM	Bubbler valve closed
10/7/2010	7:57:33 PM	Main Vac valve opened
10/7/2010	7:57:33 PM	Bypass valve opened
10/7/2010	7:57:33 PM	Helium MFC set to  0.000000
10/7/2010	7:57:33 PM	H2 MFC set to  0.000000
10/7/2010	7:57:33 PM	BCl3 MFC set to  0.000000
10/7/2010	7:57:33 PM	PHl3 MFC set to  0.000000
10/7/2010	7:57:33 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:57:33 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:57:34 PM	Tube furnace set to 0
10/7/2010	7:58:34 PM	H2 valve closed
10/7/2010	7:58:34 PM	BCl3 valve closed
10/7/2010	7:58:34 PM	PH3 valve closed
10/7/2010	7:58:34 PM	SiCl4 pre valve closed
10/7/2010	7:58:34 PM	SiCl4 post valve closed
10/7/2010	7:58:34 PM	Bubbler valve closed
10/7/2010	7:58:34 PM	Helium valve opened
10/7/2010	7:58:34 PM	Main Vac valve opened
10/7/2010	7:58:34 PM	Bypass valve opened
10/7/2010	7:58:34 PM	Helium MFC set to  100.000000
10/7/2010	7:58:34 PM	H2 MFC set to  0.000000
10/7/2010	7:58:34 PM	BCl3 MFC set to  0.000000
10/7/2010	7:58:34 PM	PHl3 MFC set to  0.000000
10/7/2010	7:58:34 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:58:34 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:58:34 PM	Tube furnace set to 0
10/7/2010	7:59:34 PM	Helium valve closed
10/7/2010	7:59:34 PM	H2 valve closed
10/7/2010	7:59:34 PM	BCl3 valve closed
10/7/2010	7:59:34 PM	PH3 valve closed
10/7/2010	7:59:34 PM	SiCl4 pre valve closed
10/7/2010	7:59:34 PM	SiCl4 post valve closed
10/7/2010	7:59:34 PM	Bubbler valve closed
10/7/2010	7:59:34 PM	Main Vac valve opened
10/7/2010	7:59:34 PM	Bypass valve opened
10/7/2010	7:59:34 PM	Helium MFC set to  0.000000
10/7/2010	7:59:34 PM	H2 MFC set to  0.000000
10/7/2010	7:59:34 PM	BCl3 MFC set to  0.000000
10/7/2010	7:59:34 PM	PHl3 MFC set to  0.000000
10/7/2010	7:59:34 PM	SiCl4 MFC set to  0.000000
10/7/2010	7:59:34 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	7:59:34 PM	Tube furnace set to 0
10/7/2010	8:00:34 PM	H2 valve closed
10/7/2010	8:00:34 PM	BCl3 valve closed
10/7/2010	8:00:34 PM	PH3 valve closed
10/7/2010	8:00:34 PM	SiCl4 pre valve closed
10/7/2010	8:00:34 PM	SiCl4 post valve closed
10/7/2010	8:00:34 PM	Bubbler valve closed
10/7/2010	8:00:34 PM	Helium valve opened
10/7/2010	8:00:34 PM	Main Vac valve opened
10/7/2010	8:00:34 PM	Bypass valve opened
10/7/2010	8:00:34 PM	Helium MFC set to  100.000000
10/7/2010	8:00:34 PM	H2 MFC set to  0.000000
10/7/2010	8:00:34 PM	BCl3 MFC set to  0.000000
10/7/2010	8:00:34 PM	PHl3 MFC set to  0.000000
10/7/2010	8:00:34 PM	SiCl4 MFC set to  0.000000
10/7/2010	8:00:34 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	8:00:34 PM	Tube furnace set to 0
10/7/2010	8:01:34 PM	Helium valve closed
10/7/2010	8:01:34 PM	H2 valve closed
10/7/2010	8:01:34 PM	BCl3 valve closed
10/7/2010	8:01:34 PM	PH3 valve closed
10/7/2010	8:01:34 PM	SiCl4 pre valve closed
10/7/2010	8:01:34 PM	SiCl4 post valve closed
10/7/2010	8:01:34 PM	Bubbler valve closed
10/7/2010	8:01:34 PM	Main Vac valve opened
10/7/2010	8:01:34 PM	Bypass valve opened
10/7/2010	8:01:34 PM	Helium MFC set to  0.000000
10/7/2010	8:01:34 PM	H2 MFC set to  0.000000
10/7/2010	8:01:34 PM	BCl3 MFC set to  0.000000
10/7/2010	8:01:34 PM	PHl3 MFC set to  0.000000
10/7/2010	8:01:34 PM	SiCl4 MFC set to  0.000000
10/7/2010	8:01:34 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	8:01:34 PM	Tube furnace set to 0
10/7/2010	8:02:34 PM	H2 valve closed
10/7/2010	8:02:34 PM	BCl3 valve closed
10/7/2010	8:02:34 PM	PH3 valve closed
10/7/2010	8:02:34 PM	SiCl4 pre valve closed
10/7/2010	8:02:34 PM	SiCl4 post valve closed
10/7/2010	8:02:34 PM	Bubbler valve closed
10/7/2010	8:02:34 PM	Helium valve opened
10/7/2010	8:02:34 PM	Main Vac valve opened
10/7/2010	8:02:34 PM	Bypass valve opened
10/7/2010	8:02:34 PM	Helium MFC set to  100.000000
10/7/2010	8:02:34 PM	H2 MFC set to  0.000000
10/7/2010	8:02:34 PM	BCl3 MFC set to  0.000000
10/7/2010	8:02:34 PM	PHl3 MFC set to  0.000000
10/7/2010	8:02:34 PM	SiCl4 MFC set to  0.000000
10/7/2010	8:02:34 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	8:02:35 PM	Tube furnace set to 0
10/7/2010	8:03:35 PM	Helium valve closed
10/7/2010	8:03:35 PM	H2 valve closed
10/7/2010	8:03:35 PM	BCl3 valve closed
10/7/2010	8:03:35 PM	PH3 valve closed
10/7/2010	8:03:35 PM	SiCl4 pre valve closed
10/7/2010	8:03:35 PM	SiCl4 post valve closed
10/7/2010	8:03:35 PM	Bubbler valve closed
10/7/2010	8:03:35 PM	Main Vac valve opened
10/7/2010	8:03:35 PM	Bypass valve opened
10/7/2010	8:03:35 PM	Helium MFC set to  0.000000
10/7/2010	8:03:35 PM	H2 MFC set to  0.000000
10/7/2010	8:03:35 PM	BCl3 MFC set to  0.000000
10/7/2010	8:03:35 PM	PHl3 MFC set to  0.000000
10/7/2010	8:03:35 PM	SiCl4 MFC set to  0.000000
10/7/2010	8:03:35 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	8:03:35 PM	Tube furnace set to 0
10/7/2010	8:04:35 PM	H2 valve closed
10/7/2010	8:04:35 PM	BCl3 valve closed
10/7/2010	8:04:35 PM	PH3 valve closed
10/7/2010	8:04:35 PM	SiCl4 pre valve closed
10/7/2010	8:04:35 PM	SiCl4 post valve closed
10/7/2010	8:04:35 PM	Bubbler valve closed
10/7/2010	8:04:35 PM	Helium valve opened
10/7/2010	8:04:35 PM	Main Vac valve opened
10/7/2010	8:04:35 PM	Bypass valve opened
10/7/2010	8:04:35 PM	Helium MFC set to  100.000000
10/7/2010	8:04:35 PM	H2 MFC set to  0.000000
10/7/2010	8:04:35 PM	BCl3 MFC set to  0.000000
10/7/2010	8:04:35 PM	PHl3 MFC set to  0.000000
10/7/2010	8:04:35 PM	SiCl4 MFC set to  0.000000
10/7/2010	8:04:35 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	8:04:35 PM	Tube furnace set to 0
10/7/2010	8:05:35 PM	Helium valve closed
10/7/2010	8:05:35 PM	H2 valve closed
10/7/2010	8:05:35 PM	BCl3 valve closed
10/7/2010	8:05:35 PM	PH3 valve closed
10/7/2010	8:05:35 PM	SiCl4 pre valve closed
10/7/2010	8:05:35 PM	SiCl4 post valve closed
10/7/2010	8:05:35 PM	Bubbler valve closed
10/7/2010	8:05:35 PM	Main Vac valve opened
10/7/2010	8:05:35 PM	Bypass valve opened
10/7/2010	8:05:35 PM	Helium MFC set to  0.000000
10/7/2010	8:05:35 PM	H2 MFC set to  0.000000
10/7/2010	8:05:35 PM	BCl3 MFC set to  0.000000
10/7/2010	8:05:35 PM	PHl3 MFC set to  0.000000
10/7/2010	8:05:35 PM	SiCl4 MFC set to  0.000000
10/7/2010	8:05:35 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	8:05:35 PM	Tube furnace set to 0
10/7/2010	8:05:36 PM	Run finished at 8:05 PM
10/7/2010	8:05:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/7/2010	8:20:53 PM	Bypass valve closed
10/7/2010	8:20:54 PM	Main Vac valve closed
10/7/2010	8:20:59 PM	Main Vac valve opened
10/7/2010	8:21:00 PM	Bypass valve opened
10/7/2010	8:21:02 PM	Helium valve opened
10/7/2010	8:21:02 PM	Helium valve closed
10/7/2010	8:21:53 PM	Recipe started at 8:21 PM
10/7/2010	8:21:53 PM	Helium valve closed
10/7/2010	8:21:53 PM	BCl3 valve closed
10/7/2010	8:21:53 PM	PH3 valve closed
10/7/2010	8:21:53 PM	SiCl4 pre valve closed
10/7/2010	8:21:53 PM	SiCl4 post valve closed
10/7/2010	8:21:53 PM	Main Vac valve closed
10/7/2010	8:21:53 PM	Bypass valve closed
10/7/2010	8:21:53 PM	Bubbler valve closed
10/7/2010	8:21:53 PM	H2 valve opened
10/7/2010	8:21:53 PM	Helium MFC set to  0.000000
10/7/2010	8:21:53 PM	H2 MFC set to  500.000000
10/7/2010	8:21:53 PM	BCl3 MFC set to  0.000000
10/7/2010	8:21:53 PM	PHl3 MFC set to  0.000000
10/7/2010	8:21:53 PM	SiCl4 MFC set to  0.000000
10/7/2010	8:21:53 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	8:21:53 PM	Tube furnace set to 100
10/7/2010	8:23:11 PM	Helium valve closed
10/7/2010	8:23:11 PM	BCl3 valve closed
10/7/2010	8:23:11 PM	PH3 valve closed
10/7/2010	8:23:11 PM	SiCl4 pre valve closed
10/7/2010	8:23:11 PM	SiCl4 post valve closed
10/7/2010	8:23:11 PM	Main Vac valve closed
10/7/2010	8:23:11 PM	Bypass valve closed
10/7/2010	8:23:11 PM	H2 valve opened
10/7/2010	8:23:11 PM	Bubbler valve opened
10/7/2010	8:23:11 PM	Helium MFC set to  0.000000
10/7/2010	8:23:11 PM	H2 MFC set to  500.000000
10/7/2010	8:23:11 PM	BCl3 MFC set to  0.000000
10/7/2010	8:23:11 PM	PHl3 MFC set to  0.000000
10/7/2010	8:23:11 PM	SiCl4 MFC set to  0.000000
10/7/2010	8:23:11 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	8:23:11 PM	Tube furnace set to 1000
10/7/2010	8:43:11 PM	Helium valve closed
10/7/2010	8:43:11 PM	PH3 valve closed
10/7/2010	8:43:11 PM	Main Vac valve closed
10/7/2010	8:43:11 PM	Bypass valve closed
10/7/2010	8:43:11 PM	H2 valve opened
10/7/2010	8:43:11 PM	BCl3 valve opened
10/7/2010	8:43:11 PM	SiCl4 pre valve opened
10/7/2010	8:43:11 PM	SiCl4 post valve opened
10/7/2010	8:43:11 PM	Bubbler valve opened
10/7/2010	8:43:11 PM	Helium MFC set to  0.000000
10/7/2010	8:43:11 PM	H2 MFC set to  500.000000
10/7/2010	8:43:11 PM	BCl3 MFC set to  100.000000
10/7/2010	8:43:11 PM	PHl3 MFC set to  0.000000
10/7/2010	8:43:11 PM	SiCl4 MFC set to  50.000000
10/7/2010	8:43:11 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	8:43:11 PM	Tube furnace set to 1000
10/7/2010	8:48:11 PM	H2 valve closed
10/7/2010	8:48:11 PM	BCl3 valve closed
10/7/2010	8:48:11 PM	PH3 valve closed
10/7/2010	8:48:11 PM	SiCl4 pre valve closed
10/7/2010	8:48:11 PM	SiCl4 post valve closed
10/7/2010	8:48:11 PM	Main Vac valve closed
10/7/2010	8:48:11 PM	Bypass valve closed
10/7/2010	8:48:11 PM	Helium valve opened
10/7/2010	8:48:11 PM	Bubbler valve opened
10/7/2010	8:48:11 PM	Helium MFC set to  500.000000
10/7/2010	8:48:11 PM	H2 MFC set to  0.000000
10/7/2010	8:48:11 PM	BCl3 MFC set to  0.000000
10/7/2010	8:48:11 PM	PHl3 MFC set to  0.000000
10/7/2010	8:48:11 PM	SiCl4 MFC set to  0.000000
10/7/2010	8:48:11 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	8:48:11 PM	Tube furnace set to 0
10/7/2010	9:08:11 PM	Helium valve closed
10/7/2010	9:08:11 PM	H2 valve closed
10/7/2010	9:08:11 PM	BCl3 valve closed
10/7/2010	9:08:11 PM	PH3 valve closed
10/7/2010	9:08:11 PM	SiCl4 pre valve closed
10/7/2010	9:08:11 PM	SiCl4 post valve closed
10/7/2010	9:08:11 PM	Main Vac valve closed
10/7/2010	9:08:11 PM	Bypass valve closed
10/7/2010	9:08:11 PM	Bubbler valve closed
10/7/2010	9:08:11 PM	Helium MFC set to  0.000000
10/7/2010	9:08:11 PM	H2 MFC set to  0.000000
10/7/2010	9:08:11 PM	BCl3 MFC set to  0.000000
10/7/2010	9:08:11 PM	PHl3 MFC set to  0.000000
10/7/2010	9:08:11 PM	SiCl4 MFC set to  0.000000
10/7/2010	9:08:11 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	9:08:11 PM	Tube furnace set to 0
10/7/2010	9:08:12 PM	Run finished at 9:08 PM
10/7/2010	9:29:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2010	9:29:25 PM	Recipe started at 9:29 PM
10/7/2010	9:29:25 PM	Helium valve closed
10/7/2010	9:29:25 PM	H2 valve closed
10/7/2010	9:29:25 PM	BCl3 valve closed
10/7/2010	9:29:25 PM	PH3 valve closed
10/7/2010	9:29:25 PM	SiCl4 pre valve closed
10/7/2010	9:29:25 PM	SiCl4 post valve closed
10/7/2010	9:29:25 PM	Main Vac valve closed
10/7/2010	9:29:25 PM	Bubbler valve closed
10/7/2010	9:29:25 PM	Bypass valve opened
10/7/2010	9:29:25 PM	Helium MFC set to  0.000000
10/7/2010	9:29:25 PM	H2 MFC set to  0.000000
10/7/2010	9:29:25 PM	BCl3 MFC set to  0.000000
10/7/2010	9:29:25 PM	PHl3 MFC set to  0.000000
10/7/2010	9:29:25 PM	SiCl4 MFC set to  0.000000
10/7/2010	9:29:25 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	9:29:25 PM	Tube furnace set to 0
10/7/2010	9:30:11 PM	Helium valve closed
10/7/2010	9:30:11 PM	H2 valve closed
10/7/2010	9:30:11 PM	BCl3 valve closed
10/7/2010	9:30:11 PM	PH3 valve closed
10/7/2010	9:30:11 PM	SiCl4 pre valve closed
10/7/2010	9:30:11 PM	SiCl4 post valve closed
10/7/2010	9:30:11 PM	Bubbler valve closed
10/7/2010	9:30:11 PM	Main Vac valve opened
10/7/2010	9:30:11 PM	Bypass valve opened
10/7/2010	9:30:11 PM	Helium MFC set to  0.000000
10/7/2010	9:30:11 PM	H2 MFC set to  0.000000
10/7/2010	9:30:11 PM	BCl3 MFC set to  0.000000
10/7/2010	9:30:11 PM	PHl3 MFC set to  0.000000
10/7/2010	9:30:11 PM	SiCl4 MFC set to  0.000000
10/7/2010	9:30:11 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	9:30:11 PM	Tube furnace set to 0
10/7/2010	9:30:11 PM	Run finished at 9:30 PM
10/7/2010	9:30:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/7/2010	10:21:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2010	10:21:41 PM	Recipe started at 10:21 PM
10/7/2010	10:21:41 PM	H2 valve closed
10/7/2010	10:21:41 PM	BCl3 valve closed
10/7/2010	10:21:41 PM	PH3 valve closed
10/7/2010	10:21:41 PM	SiCl4 pre valve closed
10/7/2010	10:21:41 PM	SiCl4 post valve closed
10/7/2010	10:21:41 PM	Main Vac valve closed
10/7/2010	10:21:41 PM	Bypass valve closed
10/7/2010	10:21:41 PM	Bubbler valve closed
10/7/2010	10:21:41 PM	Helium valve opened
10/7/2010	10:21:41 PM	Helium MFC set to  500.000000
10/7/2010	10:21:41 PM	H2 MFC set to  0.000000
10/7/2010	10:21:41 PM	BCl3 MFC set to  0.000000
10/7/2010	10:21:41 PM	PHl3 MFC set to  0.000000
10/7/2010	10:21:41 PM	SiCl4 MFC set to  0.000000
10/7/2010	10:21:41 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	10:21:41 PM	Tube furnace set to 0
10/7/2010	10:22:57 PM	Helium valve closed
10/7/2010	10:22:57 PM	H2 valve closed
10/7/2010	10:22:57 PM	BCl3 valve closed
10/7/2010	10:22:57 PM	PH3 valve closed
10/7/2010	10:22:57 PM	SiCl4 pre valve closed
10/7/2010	10:22:57 PM	SiCl4 post valve closed
10/7/2010	10:22:57 PM	Main Vac valve closed
10/7/2010	10:22:57 PM	Bypass valve closed
10/7/2010	10:22:57 PM	Bubbler valve closed
10/7/2010	10:22:57 PM	Helium MFC set to  0.000000
10/7/2010	10:22:57 PM	H2 MFC set to  0.000000
10/7/2010	10:22:57 PM	BCl3 MFC set to  0.000000
10/7/2010	10:22:57 PM	PHl3 MFC set to  0.000000
10/7/2010	10:22:57 PM	SiCl4 MFC set to  0.000000
10/7/2010	10:22:57 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	10:22:58 PM	Tube furnace set to 0
10/7/2010	10:22:58 PM	Run finished at 10:22 PM
10/7/2010	10:22:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/7/2010	10:28:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/7/2010	10:28:20 PM	Recipe started at 10:28 PM
10/7/2010	10:28:20 PM	Helium valve closed
10/7/2010	10:28:20 PM	H2 valve closed
10/7/2010	10:28:20 PM	BCl3 valve closed
10/7/2010	10:28:20 PM	PH3 valve closed
10/7/2010	10:28:20 PM	SiCl4 pre valve closed
10/7/2010	10:28:20 PM	SiCl4 post valve closed
10/7/2010	10:28:20 PM	Main Vac valve closed
10/7/2010	10:28:20 PM	Bubbler valve closed
10/7/2010	10:28:20 PM	Bypass valve opened
10/7/2010	10:28:20 PM	Helium MFC set to  0.000000
10/7/2010	10:28:20 PM	H2 MFC set to  0.000000
10/7/2010	10:28:20 PM	BCl3 MFC set to  0.000000
10/7/2010	10:28:20 PM	PHl3 MFC set to  0.000000
10/7/2010	10:28:20 PM	SiCl4 MFC set to  0.000000
10/7/2010	10:28:20 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	10:28:21 PM	Tube furnace set to 0
10/7/2010	10:29:08 PM	Helium valve closed
10/7/2010	10:29:08 PM	H2 valve closed
10/7/2010	10:29:08 PM	BCl3 valve closed
10/7/2010	10:29:08 PM	PH3 valve closed
10/7/2010	10:29:08 PM	SiCl4 pre valve closed
10/7/2010	10:29:08 PM	SiCl4 post valve closed
10/7/2010	10:29:08 PM	Bubbler valve closed
10/7/2010	10:29:08 PM	Main Vac valve opened
10/7/2010	10:29:08 PM	Bypass valve opened
10/7/2010	10:29:08 PM	Helium MFC set to  0.000000
10/7/2010	10:29:08 PM	H2 MFC set to  0.000000
10/7/2010	10:29:08 PM	BCl3 MFC set to  0.000000
10/7/2010	10:29:08 PM	PHl3 MFC set to  0.000000
10/7/2010	10:29:08 PM	SiCl4 MFC set to  0.000000
10/7/2010	10:29:08 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	10:29:08 PM	Tube furnace set to 0
10/7/2010	10:30:04 PM	H2 valve closed
10/7/2010	10:30:04 PM	BCl3 valve closed
10/7/2010	10:30:04 PM	PH3 valve closed
10/7/2010	10:30:04 PM	SiCl4 pre valve closed
10/7/2010	10:30:04 PM	SiCl4 post valve closed
10/7/2010	10:30:04 PM	Bubbler valve closed
10/7/2010	10:30:04 PM	Helium valve opened
10/7/2010	10:30:04 PM	Main Vac valve opened
10/7/2010	10:30:04 PM	Bypass valve opened
10/7/2010	10:30:04 PM	Helium MFC set to  100.000000
10/7/2010	10:30:04 PM	H2 MFC set to  0.000000
10/7/2010	10:30:04 PM	BCl3 MFC set to  0.000000
10/7/2010	10:30:04 PM	PHl3 MFC set to  0.000000
10/7/2010	10:30:04 PM	SiCl4 MFC set to  0.000000
10/7/2010	10:30:04 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	10:30:04 PM	Tube furnace set to 0
10/7/2010	10:30:11 PM	Helium valve closed
10/7/2010	10:30:11 PM	H2 valve closed
10/7/2010	10:30:11 PM	BCl3 valve closed
10/7/2010	10:30:11 PM	PH3 valve closed
10/7/2010	10:30:11 PM	SiCl4 pre valve closed
10/7/2010	10:30:11 PM	SiCl4 post valve closed
10/7/2010	10:30:11 PM	Bubbler valve closed
10/7/2010	10:30:11 PM	Main Vac valve opened
10/7/2010	10:30:11 PM	Bypass valve opened
10/7/2010	10:30:11 PM	Helium MFC set to  0.000000
10/7/2010	10:30:11 PM	H2 MFC set to  0.000000
10/7/2010	10:30:11 PM	BCl3 MFC set to  0.000000
10/7/2010	10:30:11 PM	PHl3 MFC set to  0.000000
10/7/2010	10:30:11 PM	SiCl4 MFC set to  0.000000
10/7/2010	10:30:11 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	10:30:11 PM	Tube furnace set to 0
10/7/2010	10:30:51 PM	H2 valve closed
10/7/2010	10:30:51 PM	BCl3 valve closed
10/7/2010	10:30:51 PM	PH3 valve closed
10/7/2010	10:30:51 PM	SiCl4 pre valve closed
10/7/2010	10:30:51 PM	SiCl4 post valve closed
10/7/2010	10:30:51 PM	Bubbler valve closed
10/7/2010	10:30:51 PM	Helium valve opened
10/7/2010	10:30:51 PM	Main Vac valve opened
10/7/2010	10:30:51 PM	Bypass valve opened
10/7/2010	10:30:51 PM	Helium MFC set to  100.000000
10/7/2010	10:30:51 PM	H2 MFC set to  0.000000
10/7/2010	10:30:51 PM	BCl3 MFC set to  0.000000
10/7/2010	10:30:51 PM	PHl3 MFC set to  0.000000
10/7/2010	10:30:51 PM	SiCl4 MFC set to  0.000000
10/7/2010	10:30:51 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	10:30:51 PM	Tube furnace set to 0
10/7/2010	10:30:57 PM	Helium valve closed
10/7/2010	10:30:57 PM	H2 valve closed
10/7/2010	10:30:57 PM	BCl3 valve closed
10/7/2010	10:30:57 PM	PH3 valve closed
10/7/2010	10:30:57 PM	SiCl4 pre valve closed
10/7/2010	10:30:57 PM	SiCl4 post valve closed
10/7/2010	10:30:57 PM	Bubbler valve closed
10/7/2010	10:30:57 PM	Main Vac valve opened
10/7/2010	10:30:57 PM	Bypass valve opened
10/7/2010	10:30:57 PM	Helium MFC set to  0.000000
10/7/2010	10:30:57 PM	H2 MFC set to  0.000000
10/7/2010	10:30:57 PM	BCl3 MFC set to  0.000000
10/7/2010	10:30:57 PM	PHl3 MFC set to  0.000000
10/7/2010	10:30:57 PM	SiCl4 MFC set to  0.000000
10/7/2010	10:30:57 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	10:30:57 PM	Tube furnace set to 0
10/7/2010	10:31:17 PM	H2 valve closed
10/7/2010	10:31:17 PM	BCl3 valve closed
10/7/2010	10:31:17 PM	PH3 valve closed
10/7/2010	10:31:17 PM	SiCl4 pre valve closed
10/7/2010	10:31:17 PM	SiCl4 post valve closed
10/7/2010	10:31:17 PM	Bubbler valve closed
10/7/2010	10:31:17 PM	Helium valve opened
10/7/2010	10:31:17 PM	Main Vac valve opened
10/7/2010	10:31:17 PM	Bypass valve opened
10/7/2010	10:31:17 PM	Helium MFC set to  100.000000
10/7/2010	10:31:17 PM	H2 MFC set to  0.000000
10/7/2010	10:31:17 PM	BCl3 MFC set to  0.000000
10/7/2010	10:31:17 PM	PHl3 MFC set to  0.000000
10/7/2010	10:31:17 PM	SiCl4 MFC set to  0.000000
10/7/2010	10:31:17 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	10:31:17 PM	Tube furnace set to 0
10/7/2010	10:31:29 PM	Helium valve closed
10/7/2010	10:31:29 PM	H2 valve closed
10/7/2010	10:31:29 PM	BCl3 valve closed
10/7/2010	10:31:29 PM	PH3 valve closed
10/7/2010	10:31:29 PM	SiCl4 pre valve closed
10/7/2010	10:31:29 PM	SiCl4 post valve closed
10/7/2010	10:31:29 PM	Bubbler valve closed
10/7/2010	10:31:29 PM	Main Vac valve opened
10/7/2010	10:31:29 PM	Bypass valve opened
10/7/2010	10:31:29 PM	Helium MFC set to  0.000000
10/7/2010	10:31:29 PM	H2 MFC set to  0.000000
10/7/2010	10:31:29 PM	BCl3 MFC set to  0.000000
10/7/2010	10:31:29 PM	PHl3 MFC set to  0.000000
10/7/2010	10:31:29 PM	SiCl4 MFC set to  0.000000
10/7/2010	10:31:29 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	10:31:29 PM	Tube furnace set to 0
10/7/2010	10:31:46 PM	H2 valve closed
10/7/2010	10:31:46 PM	BCl3 valve closed
10/7/2010	10:31:46 PM	PH3 valve closed
10/7/2010	10:31:46 PM	SiCl4 pre valve closed
10/7/2010	10:31:46 PM	SiCl4 post valve closed
10/7/2010	10:31:46 PM	Bubbler valve closed
10/7/2010	10:31:46 PM	Helium valve opened
10/7/2010	10:31:46 PM	Main Vac valve opened
10/7/2010	10:31:46 PM	Bypass valve opened
10/7/2010	10:31:46 PM	Helium MFC set to  100.000000
10/7/2010	10:31:46 PM	H2 MFC set to  0.000000
10/7/2010	10:31:46 PM	BCl3 MFC set to  0.000000
10/7/2010	10:31:46 PM	PHl3 MFC set to  0.000000
10/7/2010	10:31:46 PM	SiCl4 MFC set to  0.000000
10/7/2010	10:31:46 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	10:31:46 PM	Tube furnace set to 0
10/7/2010	10:31:51 PM	Helium valve closed
10/7/2010	10:31:51 PM	H2 valve closed
10/7/2010	10:31:51 PM	BCl3 valve closed
10/7/2010	10:31:51 PM	PH3 valve closed
10/7/2010	10:31:51 PM	SiCl4 pre valve closed
10/7/2010	10:31:51 PM	SiCl4 post valve closed
10/7/2010	10:31:51 PM	Bubbler valve closed
10/7/2010	10:31:51 PM	Main Vac valve opened
10/7/2010	10:31:51 PM	Bypass valve opened
10/7/2010	10:31:51 PM	Helium MFC set to  0.000000
10/7/2010	10:31:51 PM	H2 MFC set to  0.000000
10/7/2010	10:31:51 PM	BCl3 MFC set to  0.000000
10/7/2010	10:31:51 PM	PHl3 MFC set to  0.000000
10/7/2010	10:31:51 PM	SiCl4 MFC set to  0.000000
10/7/2010	10:31:51 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	10:31:51 PM	Tube furnace set to 0
10/7/2010	10:32:36 PM	H2 valve closed
10/7/2010	10:32:36 PM	BCl3 valve closed
10/7/2010	10:32:36 PM	PH3 valve closed
10/7/2010	10:32:36 PM	SiCl4 pre valve closed
10/7/2010	10:32:36 PM	SiCl4 post valve closed
10/7/2010	10:32:36 PM	Bubbler valve closed
10/7/2010	10:32:36 PM	Helium valve opened
10/7/2010	10:32:36 PM	Main Vac valve opened
10/7/2010	10:32:36 PM	Bypass valve opened
10/7/2010	10:32:36 PM	Helium MFC set to  100.000000
10/7/2010	10:32:36 PM	H2 MFC set to  0.000000
10/7/2010	10:32:36 PM	BCl3 MFC set to  0.000000
10/7/2010	10:32:36 PM	PHl3 MFC set to  0.000000
10/7/2010	10:32:36 PM	SiCl4 MFC set to  0.000000
10/7/2010	10:32:36 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	10:32:36 PM	Tube furnace set to 0
10/7/2010	10:32:48 PM	Helium valve closed
10/7/2010	10:32:48 PM	H2 valve closed
10/7/2010	10:32:48 PM	BCl3 valve closed
10/7/2010	10:32:48 PM	PH3 valve closed
10/7/2010	10:32:48 PM	SiCl4 pre valve closed
10/7/2010	10:32:48 PM	SiCl4 post valve closed
10/7/2010	10:32:48 PM	Bubbler valve closed
10/7/2010	10:32:48 PM	Main Vac valve opened
10/7/2010	10:32:48 PM	Bypass valve opened
10/7/2010	10:32:48 PM	Helium MFC set to  0.000000
10/7/2010	10:32:48 PM	H2 MFC set to  0.000000
10/7/2010	10:32:48 PM	BCl3 MFC set to  0.000000
10/7/2010	10:32:48 PM	PHl3 MFC set to  0.000000
10/7/2010	10:32:48 PM	SiCl4 MFC set to  0.000000
10/7/2010	10:32:48 PM	Bypass solenoid MFC set to  0.000000
10/7/2010	10:32:49 PM	Tube furnace set to 0
10/7/2010	10:32:57 PM	Run aborted at 10:32 PM
10/7/2010	10:32:57 PM	Helium valve closed
10/7/2010	10:32:57 PM	H2 valve closed
10/7/2010	10:32:57 PM	BCl3 valve closed
10/7/2010	10:32:57 PM	PH3 valve closed
10/7/2010	10:32:57 PM	SiCl4 pre valve closed
10/7/2010	10:32:57 PM	SiCl4 post valve closed
10/7/2010	10:32:57 PM	Bypass valve closed
10/7/2010	10:32:57 PM	Main Vac valve closed
10/7/2010	10:32:57 PM	Bubbler valve closed
10/7/2010	10:32:57 PM	Helium MFC set to  0.000000
10/7/2010	10:32:57 PM	H2 MFC set to  0.000000
10/7/2010	10:32:57 PM	BCl3 MFC set to  0.000000
10/7/2010	10:32:57 PM	PHl3 MFC set to  0.000000
10/7/2010	10:32:57 PM	SiCl4 MFC set to  0.000000
10/7/2010	10:32:57 PM	Tube furnace set to 0
10/7/2010	10:32:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/7/2010	10:33:01 PM	Bypass valve opened
10/7/2010	10:33:04 PM	Main Vac valve opened
